论文部分内容阅读
The Effect of Unbalanced Coefficient of Magnetron on the Structure and Properties of CNx Coatings
【机 构】
：
School of Material Science and Engineering, Xi’an University of Technology, Xi’an 710048, China
【出 处】
：
武汉理工大学学报(材料科学版)(英文版)
【发表日期】
：
2011年2期
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