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简要地介绍了常见MEMS开关的工作原理,并根据不同的驱动方式和工作频率范围对MEMS开关进行分类。根据引信可靠性要求,强调了能够保证引信电源内部接电回路MEMS开关性能的3个关键参数:开关闭合时间、接触可靠性以及接电性能。最后,列出了部分能够有效改善这些参数性能的解决方案。如通过沿着悬臂梁方向采用韧窝结构、提高有效刚度以及在驱动极板上穿孔等措施来减少开关的闭合时间;此外,采用合适的软着陆电压波形、软金属材料以及闭锁机构等措施来提高接触可靠性;同时选择合适的材料、特殊的设计结构以及控制适当的粗糙度等来实现良好的接电性能。
Briefly introduced the working principle of common MEMS switch, and according to different driving mode and operating frequency range to classify MEMS switch. According to the requirements of fuze reliability, the three key parameters that can guarantee the MEMS switch performance of the internal power circuit of the fuse are emphasized: the switch closure time, the contact reliability and the electrical connection performance. Finally, some of the solutions that effectively improve the performance of these parameters are listed. Such as reducing the closing time of the switch by adopting the dimple structure along the cantilever, increasing the effective rigidity and perforation in the driving plate, etc. In addition, by adopting suitable soft landing voltage waveforms, soft metal materials and the locking mechanism Improve contact reliability; at the same time choose the right material, the special design of the structure and the control of the appropriate roughness to achieve good electrical properties.