介绍了基于计算机控制的频闪显微干涉测量技术,实现了对MEMS微变形镜的表面形貌、离面变形、静态电压-位移曲线和谐振频率的测量。采用频闪成像、计算机微视觉技术以及基于最小二乘曲面拟合法的亚像素定位技术实现了对平面内微位移的测量;利用频闪成像以及5步相移干涉技术实现了对干涉相位的提取,建立了适合于MEMS微变形镜特性测试的相位解缠算法,恢复了代表被测物体表面形貌的真实相位,实现了微变形镜静动态特性的测试。测试结果表明:频闪显微相移干涉测量技术具有测量速度快、精度高、易实现自动控制等特点。 The technology of stroboscopic micromechanical interferometry based on computer control was introduced. The surface morphology, out-plane deformation, static voltage-displacement curve and resonance frequency of MEMS micro-deformable mirror were measured. The measurement of in-plane micro-displacement is realized by stroboscopic imaging, computer micro-vision technology and sub-pixel localization based on least-squares surface fitting method. The extraction of interference phase by stroboscopic imaging and 5-step phase-shift interferometry , A phase unwrapping algorithm suitable for testing the characteristics of MEMS micro-deformable mirrors is established, the true phase representing the surface topography of the measured object is restored, and the static and dynamic characteristics of the micro-deformable mirror are tested. The test results show that the stroboscopic microseismic phase shift interferometry has the advantages of fast measuring speed, high precision and easy to realize automatic control.