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用磁控溅法在载波片上制备了TiNx/Ag/TiNx复合膜。采用X射线衍射、X射线光电子能谱(XPS)研究了复合膜的晶体结构和TiNx薄膜的化学成分;用紫外-可见分光光度计分析了氮气流量、各层膜膜厚对复合膜可见光透射率的影响。研究表明,TiNx薄膜为非晶态,Ag膜为晶态;TiNx薄膜提高了复合膜的远红外反射率,且其表面存在大量Ti-O键;复合膜的可见光透射率随着氮气流量的增加而变大,随着Ag膜厚度的增加先增后减。当氮气流量为55cm3/s,膜层构造为TiNx(16nm)/Ag(16nm)/TiNx(32nm)时,复合膜在550nm处的可见光透射率达到85%,远红外反射率达到92%,辐射率为0.0925,具有优异的低辐射玻璃光学性能。
TiNx / Ag / TiNx composite films were prepared on the carrier by magnetron sputtering. The crystal structure and chemical composition of TiNx thin films were investigated by X-ray diffraction and X-ray photoelectron spectroscopy (XPS). The effects of nitrogen flow rate, film thickness on the visible light transmittance Impact. The results show that the TiNx film is amorphous and the Ag film is crystalline. The TiNx film increases the far-infrared reflectivity of the composite film and has a large number of Ti-O bonds on the surface. The visible light transmittance of the composite film increases with the increase of the nitrogen flow rate The larger, with the increase of Ag film thickness increased after the reduction. When the flow rate of nitrogen is 55cm3 / s and the structure of TiNx (16nm) / Ag (16nm) / TiNx (32nm) is constructed, the visible light transmittance of the composite film reaches 85% at 550nm and the far infrared reflectance reaches 92% The rate of 0.0925, with excellent low-e glass optical properties.