论文部分内容阅读
首先综述了微空心阴极放电的基本原理,然后详细论述了微空心阴极维持的辉光放电(MCSD)以及MCSD的放电参数对产生大体积高压辉光放电等离子体源的影响,最后论述了MCSD运行方式对产生高压辉光放电等离子体源的影响。
Firstly, the basic principle of micro-hollow cathode discharge is reviewed. Then, the effects of MCSD and MCSD discharge parameters on the generation of large-volume high-voltage glow discharge plasma source are discussed in detail. Finally, the effects of MCSD operation Mode on the generation of high voltage glow discharge plasma source.