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在这篇论文中,一个能计算分子泵3D流动的数学模型被建立了。这个模型可以模拟在分子泵抽气通道内的气体分子速度与压力的分布。
In this paper, a mathematical model that calculates the 3D flow of a molecular pump is established. This model simulates the distribution of gas molecule velocities and pressures within the pump suction channel.