由于光学薄膜的透射光谱和反射光谱受表面粗糙程度的影响很大,因此在确定表面粗糙薄膜的厚度及光学常量时,如果不考虑这种影响必然会引起较大的误差。利用标量波散射理论,引入表面均方根粗糙系数,对粗糙薄膜表面的光散射进行了细致分析,得出了光散射影响下薄膜系统透射系数的表达式。在此基础上计算的薄膜厚度以及透射光谱与制备的氢化非晶硅薄膜的相应测量结果基本一致,由此确定的光学常量也更接近实际量值。该方法的运算过程不基于最小值优化算法,无需复杂软件辅助,是准确确定表面粗糙薄膜的厚度以及光学常量的一种有效方法。 Since the optical transmission and reflection spectra of optical films are greatly influenced by the degree of surface roughness, it is bound to cause large errors in determining the thickness and optical constants of the surface roughness films. Using the scalar wave scattering theory, the surface root mean square roughness coefficient is introduced to analyze the light scattering on the rough film surface. The expression of the transmission coefficient of the film system under the influence of light scattering is obtained. The calculated film thickness and transmission spectrum based on this are basically consistent with the corresponding measurement results of the prepared hydrogenated amorphous silicon thin film, and the optical constants determined thereby are also closer to the actual value. The calculation of this method is not based on the minimum optimization algorithm and does not need complicated software aids. It is an effective method to accurately determine the thickness and the optical constants of the surface roughness film.