论文部分内容阅读
A radio-frequency (rf) plasma sheath model in an oblique magnetic field is establishedand the energy distribution of ions (IED) incident on the rf sheath biased electrodes isnumerically investigated. The simulation results reveal that the external magnetic field can havea decisive impact on the ion flux and energy distribution of the sheath. The ion energy can betransferred between the perpendicular and parallel components under the action of a magneticfield.
A radio-frequency (rf) plasma sheath model in an oblique magnetic field is established and the energy distribution of ions (IED) incident on the rf sheath biased electrodes isnumerically investigated. The simulation results reveal that the external magnetic field can havea decisive impact on the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular and parallel components under the action of a magnetic field.