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基于光学相控阵理论和钛扩散铌酸锂光波导的导模特性,提出了一种新型阵列集成光波导应用于光学相控。根据光束传输法(BPM),并结合现有半导体工艺水平及参数,对该阵列波导的导光特性,损耗特性以及耦合特性进行了仿真计算,最终给出了相控阵的结构设计参数。结果表明,应用该集成阵列波导的光学相控阵结构可实现光束连续精确定向偏转,偏转角度可达±4.5°,相位控制半波电压小于6 V,其系统光学控制单元损耗低且响应速度快。
Based on the optical phased array theory and the guided-mode properties of titanium-doped lithium niobate optical waveguide, a novel array integrated optical waveguide is proposed for optical phase-control. The light guide characteristics, the loss characteristics and the coupling characteristics of the arrayed waveguide were calculated by the beam-transfer method (BPM) combined with the current semiconductor technology and parameters. Finally, the structural design parameters of the phased array were given. The results show that the optical phased array with integrated array waveguide can achieve continuous and accurate deflecting with a deflection angle of ± 4.5 ° and a phase-controlled half-wave voltage of less than 6 V. The system optical control unit has low loss and fast response .