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采用衰减全反射（ＡＴＲ）技术，单波长激励金属膜表面等离子激元波（ＳＰＷ）的共振吸收峰，在考虑金属膜表面粗糙度的情况下，用非线性最小二乘曲线拟合同时确定出了金属膜厚度与介电常数，并在另一波长下获得验证。
Resonance absorption peak of plasmon wave (SPW) of single-wavelength excited metal film was determined by attenuated total reflection (ATR) technique. Non-linear least squares curve fitting was used to determine the surface roughness of metal film simultaneously The thickness and dielectric constant of the metal film were verified at another wavelength.