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基于位置敏感探测器(PSD)的相位法探测入射光点的原理,利用RC等效模型得到一维PSD两电极输出电流信号的相位和相位差。分析了相位与调制频率和入射光点位置x的关系,并得出相位差在不同调制频率下的响应特性。在一维PSD上的实验测试结果表明,利用相位差测量的线性关系显著,并且随着调制频率的增大测量灵敏度提高。
Based on the principle of position-sensitive detector (PSD) detecting the incident light spot, the RC equivalent model is used to obtain the phase and phase difference of one-dimensional PSD two-electrode output current signal. The relationship between the phase and the modulation frequency and the position x of the incident spot is analyzed, and the response characteristics of the phase difference at different modulation frequencies are obtained. Experimental results on a one-dimensional PSD show that linearity with phase difference measurements is significant, and measurement sensitivity increases as the modulation frequency increases.