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用JGP560D型双室多功能磁控溅射仪成功制备了Fe-Zr-B非晶磁性薄膜,并获得了良好的磁性能。研究了制备工艺对薄膜性能的影响。
The Fe-Zr-B amorphous magnetic thin films were successfully prepared by JGP560D dual-chamber multi-function magnetron sputtering instrument and good magnetic properties were obtained. The effects of preparation process on the properties of the films were investigated.