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微机电系统 (MEMS)是近年来兴起的一门新兴技术 ,微行星齿轮减速器是微机电系统中的重要器件。在模数≤ 0 .0 6mm的微行星齿轮减速器的研制中 ,引入CAD/CAM技术 ,并成功的设计制造出了样机
Micro-Electro-Mechanical System (MEMS) is an emerging technology emerging in recent years. Micro-planetary gear reducer is an important component in MEMS. In the development of micro-planetary gear reducer with modulo ≤ 0 .0 6mm, CAD / CAM technology was introduced and a prototype was successfully designed