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本文描述硅光波导技术的重大突破：（１）用ＳＩＭＯＸ技术代替传统的硅外延型光波导，解决了衬底吸收光波．从而显著改善了光波导的传播损耗．（２）在理论及实验上均已解决用调整脊形的高宽比（高宽均能达１０微米左右），制取单模脊形光波导．这种光波导的下覆盖层是ＳｉＯ２，传播损耗小；断面积大，和单模光纤耦合良好．满足了光集成技术中对光波导的几项重要要求．
This article describes a major breakthrough in silicon optical waveguide technology: (1) SIMOX technology to replace the traditional silicon epitaxial optical waveguide to solve the substrate to absorb light waves. Thus significantly improving the propagation loss of the optical waveguide. (2) In both theory and experiment, a single mode ridge optical waveguide is prepared by adjusting the aspect ratio of the ridge (the height and width can both reach about 10 microns). The lower cover of this optical waveguide is SiO2, with low propagation loss; large cross-sectional area and good coupling with single mode fiber. Meets several important requirements for optical waveguides in optical integration technology.