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采用激光诱导二甲基二乙氧基硅烷气相合成了ＳｉＣ纳米陶瓷粉，对其合成工艺进行了研究，用多种分析手段对粉体进行了测试表征，同时对合成的非晶纳米ＳｉＣ粉和初期晶化进行了探讨。实验结果表明：通过控制反应物蒸气流量，可对反应温度进行控制，从而实现对粉体组成、结构进行控制。在其他条件不变时，当反应物蒸气流量为７００～８２０ｓｃｃｍ时，可制得较为理想的平均粒径为１０～１５ｎｍ的非晶ＳｉＣ纳米粉；非晶ＳｉＣ纳米粉在１１６０℃氩气氛下晶化处理，开始晶化，由非晶ＳｉＣ经固相反应得到β－ＳｉＣ。
The SiC nano-ceramic powder was synthesized by laser induced dimethyldiethoxysilane in the gas phase. The synthesis process was studied. The powder was tested and characterized by many analytical methods. Meanwhile, The initial crystallization was discussed. The experimental results show that the reaction temperature can be controlled by controlling the flow rate of the reactants, so that the composition and structure of the powder can be controlled. Under other conditions, when the reactant vapor flow rate is 700 ~ 820sccm, an ideal SiC nanopowder with an average particle size of 10 ~ 15nm can be obtained. The amorphous SiC nanopowder crystallizes in an argon atmosphere at 1160 ℃ Treatment, start crystallization, from the amorphous SiC by solid-phase reaction β-SiC.