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一、引言晶体管的发明使半导体电子技术在电子学领域,甚至在整个工业领域占领了重要地位,尤其是五十年代末集成电路(IC)出现后,这种地位取得了绝对优势,除大功率器件领域仍部分为电真空器件占有外,绝大部分都为以晶体管为基础的半导体器件所占有。从直流到高频;从模拟电路到数字电路;从空间技术、卫星通信到个人用收音机、计算器,到处都可看到半导体的踪迹。七十年代,尤其是八十年代以后,以LSIC和VLSIC为核心的微电子技术的迅猛发展,使电子工业和机械、光学、能源、冶金、交通、邮电等部门发生了深刻的变化,迅速向着高速度、高效率、高可靠、低消耗、信息化、智能化、系统化的方向发展。
I. INTRODUCTION The invention of transistor makes semiconductor electronic technology occupy an important position in the field of electronics and even in the whole industry. Especially after the emergence of integrated circuits (ICs) in the late 1950s, this position has gained an absolute advantage. In addition to high power The field of devices is still partly occupied by electrical vacuum devices, the vast majority of which are occupied by transistor-based semiconductor devices. From DC to high frequency; from analog circuits to digital circuits; from space technology, satellite communications to personal radios, calculators, semiconductor traces can be seen everywhere. In the 1970s, especially after the 1980s, the rapid development of microelectronics based on LSIC and VLSIC has brought profound changes to the electronics industry and other departments such as machinery, optics, energy, metallurgy, transportation, post and telecommunications, High-speed, high efficiency, high reliability, low consumption, information, intelligence, systematic direction.