本文介绍一种新型的高分子薄膜型湿度传感器的结构、感湿原理,制造工艺过程及其湿敏特性。湿敏材料由高分子电解质——聚苯乙烯磺酸钠、粘结剂聚乙烯醇、交联剂的水溶液——按一定重量比配制而成。为了改善其湿敏特性和抗湿性,对已涂复湿敏膜的传感器进行低温等离子体处理。这种新型湿度传感器具有体积小(仅4mm×6mm)、制造工艺简单、成本低、响应速度快等优点。而且它的湿敏特征量——电阻的对数与相对湿度成线性关系,便于二次仪表设计,可望在各个领域的湿度实时检测和控制中获得广泛应用。 This article introduces the structure of a new type of polymer film humidity sensor, the principle of wet feeling, the manufacturing process and its humidity-sensitive properties. Humidity-sensitive materials from the polymer electrolyte - sodium polystyrene sulfonate, binder polyvinyl alcohol, crosslinker aqueous solution - formulated by a certain weight ratio. In order to improve its moisture sensitivity and moisture resistance, the sensor has been coated with a humidity sensitive film for low temperature plasma treatment. This new type of humidity sensor with small size (only 4mm × 6mm), the manufacturing process is simple, low cost, fast response and so on. And its moisture-sensitive features - the logarithm of resistance and relative humidity as a linear relationship, easy secondary instrument design, is expected in various fields of humidity in real-time detection and control of a wide range of applications.