等离子体技术是近20年间发展起来的。它可以在很大的温度和压力范围内为不同的用途提供纯净热源气体或高温、低温反应工质,因而从一开始就引起科学家和工程师们对它的关心和兴趣。对它的研究进展很迅速,仅从1985年7月在荷兰召开的第7届国际等离子体化学会议(ISPC-7)来看,到会科学家587人,提出论文263篇,内容极其广泛,显示 Plasma technology has developed over the past 20 years. It provides pure source gases or high temperature, low temperature reactive working fluids for a wide range of applications over a wide range of temperatures and pressures, and has drawn the interest and interest of scientists and engineers from the beginning. The research on it is progressing rapidly. Only from the 7th International Conference on Plasma Chemistry (ISPC-7) held in July 1985 in the Netherlands, 587 scientists attended the conference, and 263 papers were submitted,