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采用直流磁控溅射法在石英玻璃基片上制备了Fe_(51)Pd_(49)纳米颗粒膜,将其在500~700℃下进行不同时间的热处理,利用场发射高倍扫描电子显微镜(SEM)、X射线衍射仪(XRD)、振动样品磁强计(VSM)研究了热处理时间、温度对薄膜结构、形貌和磁性能的影响。结果表明,在600℃热处理温度下,随着热处理时间的增加,薄膜由面心立方(fcc)相向面心四方(fct)相转变,fct相的衍射峰逐渐增强,薄膜产生的孔洞随之扩大,膜面由制备态的连续分布转变为不连续的类岛状,并产生了分层,其矫顽力、剩磁比表现出先增大后减小的趋势,最大值分别为0.29 T,0.94。降低热处理温度至550℃,进行3 h的热处理后发现样品也能进行充分的fcc-fct相转变,矫顽力也能达到0.29 T,剩磁比为0.90。本研究有效降低了FePd合金的相转变温度。
The Fe_ (51) Pd_ (49) nanoparticle films were prepared on a quartz glass substrate by direct current magnetron sputtering. The films were heat treated at 500 ~ 700 ℃ for different time, and were characterized by field emission scanning electron microscopy (SEM) , X-ray diffraction (XRD) and vibrating sample magnetometer (VSM). The effects of heat treatment time and temperature on the structure, morphology and magnetic properties of the films were investigated. The results show that with the increase of heat treatment time, the film changes from fcc phase to fct phase at 600 ℃, and the diffraction peak of fct phase increases gradually, , The film surface changed from the continuous distribution of preparation state to the discontinuous island-like shape, and the stratification occurred. The coercivity and remanence showed the trend of first increasing and then decreasing, with the maximum values of 0.29 T and 0.94 . Reducing the heat treatment temperature to 550 ° C, after 3 h of heat treatment, the sample was also found to undergo a sufficient fcc-fct phase transition with a coercivity of 0.29 T and a remanence ratio of 0.90. This study effectively reduces the phase transition temperature of FePd alloy.