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1微机电系统一般说来，微机电系统（而．croelectronicmechanicalsystem，MEMS）是指可以用微电子等批量加工工艺制造的集微机械与微电子等部件于一体的部件或结构，它可以分成多个独立的功能单元，输入的物理或化学信号由传感器转换为电信号，经过信号处理后，通过执行器与外?
1 Microelectromechanical system In general, micro-electromechanical system (.roelectronicmechanicalsystem, MEMS) refers to the micro-electronics and other batch processing technology can be made of micro-mechanical and microelectronics and other components in one part or structure, which can be divided into multiple Independent functional unit, the input of physical or chemical signals from the sensor into electrical signals, after signal processing, through the actuator and external?