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本文提出了一种可用于集成电路装配和质量控制的、带有双投影物镜和全息光学元件散射全息屏幕的投影型全息显微镜(PHM)系统。介绍了该系统的光学原理、全息散射屏幕的记录方案、系统色差的改善和投影显微系统的特性。
This paper presents a projection holographic microscope (PHM) system with a dual projection objective and a holographic holographic optical element holographic screen for integrated circuit assembly and quality control. The optical principle of the system, the recording scheme of holographic scattering screen, the improvement of system color difference and the characteristics of projection microscopy system are introduced.