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我国目前一台大型空间环境模拟设备,直径7米,高12米,容积400米~3。本文简介了超高真空系统的设计和调试情况,容器极限真空度为3.8×10~(-3)托。一、抽气系统的设计通常,大型空间环模室真空获得系统的设计可采用三种方案:早期(六十年代),采用大量的油扩散泵机组,尽量布满容器周围,如美国斯托克公司所研制的一台直径10米的环模室,用17台5万升/秒抽速的油扩散泵机组,容器极限真空为10~(-6)托。我们将此称为第一代抽气系统。第二代真空获得系统,是采用油扩散泵与20K深冷泵的组合抽气系统。由于引进有巨大抽速的深冷泵,抽气时间缩短,处理气体能力增大,极限真空达到10~(-8)托至10~(-9)
At present, China has a large-scale space environment simulation equipment with a diameter of 7 meters, a height of 12 meters and a capacity of 400-3. This article describes the design and commissioning of the ultrahigh vacuum system with a vessel ultimate vacuum of 3.8 × 10 -3 torr. First, the exhaust system design Usually, the large space ring chamber vacuum access system design can be used three options: Early (sixties), using a large number of oil diffusion pump unit, as far as possible around the container, such as the United States Stowe The company developed a diameter of 10 m ring mold room, with 17 sets of 50,000 liters / s pumping speed oil diffusion pump unit, the container ultimate vacuum of 10 ~ (-6) care. We call this the first generation of pumping system. The second generation of vacuum access system, is a combination of oil diffusion pump and 20K cryogenic pump extraction system. Due to the introduction of a cryogenic pump with a large pumping speed, the pumping time is shortened and the processing gas capacity is increased. The ultimate vacuum reaches 10 ~ (-8) torr to 10 ~ (-9)