微型机电系统正成为世界各国竞相投资开发的热点，人们期待着它能够像微电子一样，带来一场新的技术革命。上海交通大学和北京大学合作开发出了一种微细加工新技术——ＤＥＭ技术，利用该技术可以对非硅材料进行三维微加工。目前，研究人员利用该技术已获得了微复制模具，并模 Micro-electromechanical systems are becoming a hot spot in the world for investment and development. People expect that it will bring a new technological revolution like microelectronics. Shanghai Jiaotong University and Peking University developed a new micro-processing technology - the DEM technology, the use of non-silicon materials can be three-dimensional micro-machining. At present, researchers have used this technique to obtain microreplicated molds and molds