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一般来说,使用光栅尺为基准的高精度仪器,由于光栅尺制造精度不能满足仪器总精度要求,就要考虑对光栅仪器或光栅尺制造偏差进行修正。常见的光栅仪器误差修正方法是按要求给副光栅一个附加位移,或者是用光学扫描方法,使副光栅的象在光栅尺上有一个微小位移。这里介绍一种新的方法。这种方法与前两种方法相比,能收到修正机构制造精度低和仪器结构简单而获得修正后残差小的效果。根据光栅幅工作原理,当光栅幅的主副光栅相对位移一个栅节距时,光栅幅形成的莫尔条纹也相应位移一个条纹宽度。如果给接收莫
In general, the use of grating-based high-precision instruments, because the grating manufacturing precision can not meet the total accuracy requirements of the instrument, it is necessary to consider the manufacture of grating devices or grating deviation correction. The common method of grating instrument error correction is to add an additional displacement to the sub-grating as required or to use optical scanning to make the sub-grating image have a slight displacement on the scale. Here’s a new method. Compared with the former two methods, this method can receive the effect that the correction mechanism has low manufacturing precision and the structure of the instrument is simple, and the residual after correction is small. According to the working principle of the raster amplitude, when the main raster and the sub raster of the raster frame are relatively shifted by a grid pitch, the moire fringes formed by the raster frames are correspondingly shifted by one stripe width. If you receive Mo