论文部分内容阅读
介绍了荷能团簇飞行时间质谱仪的原理及其在荷能团簇碰撞沉积装置中的物理设计。对实验中出现的若干问题进行了探讨，并提出了解决的措施。
The principle of CETC mass spectrometer and its physical design in CAC collision deposition equipment are introduced. Several problems appeared in the experiment were discussed, and the solutions to the problems were put forward.