长期以来德国MEMS衬底制造商Plan Optik一直是玻璃晶圆市场的领衔企业,因此Plan Optik推出世界首个直径为300mm的玻璃晶圆产品生产线,随之设定了玻璃晶圆生产规格的新标准。多年来300mm一直是半导体应用产品中Si晶圆的标准,现今也逐渐成为MEMS产业的标准。MEMS系统较为复杂,它 Plan Optik, the German MEMS substrate manufacturer, has long been the leader in the glass wafer market, so Plan Optik introduced the world’s first glass wafer line with a diameter of 300 mm, which sets new standards in glass wafer production specifications . 300mm has been the standard for Si wafers in semiconductor applications over the years and is now becoming the standard in the MEMS industry. MEMS system is more complex, it