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纳米固体材料由于具有高浓度界面的结构特性以及相伴随着的新颖物性,1984年以后在材料各个领域得以迅速发展。近年来,随着纳米材料在许多领域的兴起,纳米硅薄膜也受到人们越来越多的关注。纳米硅薄膜是由大量的纳米尺寸晶粒及晶粒间界面构成。由于晶粒具有无规则分布的特征,使得界面具有不同的结构和键合特征。界面对纳米硅薄膜的结构和物性具有极其重要的影响。
Since 1984, nanomaterials have developed rapidly in various fields of materials due to the structural characteristics of high-concentration interfaces and the accompanying novelty. In recent years, with the rise of nanomaterials in many fields, nanosilica films are also attracting more and more attention. Nano-silicon thin film is composed of a large number of nano-sized grains and intergranular interface. Due to the irregular distribution of the grains, the interface has different structures and bonding characteristics. The interface has an extremely important influence on the structure and physical properties of the nano-silicon film.