利用自主研制的全悬浮双探针,对影响双频容性耦合等离子体径向均匀性的因素进行了研究.发现低频功率、放电气压和放电间距对径向均匀性有明显影响.合适的低频功率、放电气压及较大的极板间距可以得到更均匀的等离子体.采用与实验相同的放电参数,利用改进的二维流体模型进行理论模拟,得到了不同极板问距下径向离子密度分布,并和实验测量结果进行了比较,两者的变化趋势基本符合. The influence of the low-frequency power, the discharge pressure and the discharge distance on the radial uniformity has been studied by using the self-developed full levitation probe. The suitable low frequency Power, discharge pressure and larger plate spacing can get a more uniform plasma.Using the same discharge parameters of the experiment, using a modified two-dimensional fluid model for theoretical simulation, the radial ion density Distribution, and compared with the experimental measurement results, the trend of the two basically consistent.