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综述了掺铝氧化锌(ZAO)透明导薄膜的化学法制备技术、及应用前景,重点介绍了溶胶-凝胶法制备ZAO薄膜的热处理条件、溶胶浓度、陈化时间、加水量以及稳定剂种类和用量等方面对薄膜结构和性能的影响。
The preparation techniques and application prospect of ZAO transparent conducting thin films are reviewed. The heat treatment conditions, sol concentration, aging time, water addition amount and stabilizer type of ZAO thin films prepared by sol-gel method are introduced emphatically And dosage aspects of the film structure and performance.