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基于严格耦合波和增强透射矩阵的方法,提出了一种数值稳定的求解多层介质膜光学特性的机理模型.利用该模型计算了多层介质膜光栅用高反射镜的优化设计膜系.使用电子束热蒸发方式制备的多层介质膜光谱特性和理论设计的结果符合得很好,该严格耦合波模型是分析介质膜光学特性有效的稳定的数值求解方法.
Based on the strict coupling wave and enhancement of transmission matrix, a numerical stable mechanism model for solving the optical property of multilayer dielectric films is proposed. The optimal design of the multi-layer dielectric film grating reflector is calculated by using this model. The spectral properties of multilayer dielectric films fabricated by Evaporative Thermal Evaporation are in good agreement with the theoretical design results. The rigorous coupled-wave model is an effective and stable numerical solution method for analyzing the optical properties of dielectric films.