In order to study the temperature simulation of berry slices in microwave vacuum puffing process, numerical simulation method was used to simulate the temperature in different time according to theoretical calculation result and the deviation had been verificated throughout the experiment. The better uniform of temperature between experiment and simulation could be concluded except in the period of rapid temperature increase. The temperature reached the high point of 130.25℃ in the middle point of slices at 100 s, while the temperature was over 50℃ in external parts of slices for the reason of thermal diffusion. Conclusions could be drawn that the model was effective and numerical analysis could simulate the temperature simulation for berry leather in microwave vacuum puffing process.