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针对MEMS仿生矢量水听器灵敏度和频带相互制约,不能同时满足宽频带高灵敏度测量的问题,在单个MEMS矢量水听器的基础上,设计了由四个单元构成的2×2单片集成微敏感结构阵列,实现了水听器的高灵敏度和宽频带。通过理论分析和ANSYS仿真分析,确定阵列微结构的尺寸,采用硅微机械加工工艺完成了阵列微结构的加工,最后在水声一级计量站对封装好的水听器进行了灵敏度和指向性校准测试。测试结果表明:该阵列式仿生矢量水听器未加前置放大时灵敏度达到-189 dB,频响范围20～5 000 Hz,具有良好的“8”字型指向性。
The sensitivity and frequency band of MEMS bionic vector hydrophone are restricted by each other, and can not meet the requirement of broadband high-sensitivity measurement at the same time. Based on a single MEMS vector hydrophone, a 2 × 2 monolithic integrated micro Sensitive structure array, to achieve a high sensitivity and wideband hydrophone. Through the theoretical analysis and ANSYS simulation analysis, the size of the array micro-structure is determined, and the micro-structure of the array is finished by using the silicon micromachining process. Finally, the sensitivity and directivity of the hydrophone are measured at a water- Calibration test. The test results show that the array biomimetic vector hydrophone has a sensitivity of -189 dB without preamplifier and a frequency response range of 20-5000 Hz, which has a good “8” font orientation.