旋转CVI制备C/SiC复合材料

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旋转 CVI是在 CVI原理基础上发展的一种制备 C/SiC复合材料的新工艺,通过石墨衬底的旋转,使预制体的制备与基体的沉积同步进行,能有效消除一般CVI工艺过程中存在的“瓶颈”效应.在自制的旋转 CVI设备上实验,探索了旋转 CVI工艺参数中 CH3SiCl3(MTS)的流量与浓度、沉积温度和C布缠绕线速度对SiC基体沉积速度,以及沉积温度对基体结构的影响.并在低压(5kPa)、高温 (1100℃)、 400 mL·min-1 H2、 200 mL·min-1Ar、 MTS40℃与C布以1.1~3.5mm·min-1的线速度连续旋转的沉积条件下,实现了单丝纤维间微观孔隙、纤维束之间以及C布层间宏观孔隙的致密化同步完成.
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