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高精度标定力的产生是微推力高精度测量的关键之一。电磁力具有非接触、结构简单、容易控制等优势,成为微推力测量系统有效的标定力产生方法。针对微推力测量对于电磁标定力的性能要求,研究了磁铁与线圈之间相对位置变化对电磁力大小的影响关系,通过仿真计算得到了轴向距离、径向偏差、相对倾角变化下的电磁力输出特性:相对倾角、径向偏差不为0时,电磁力均会变大,且关于磁铁中心轴线具有对称性,沿轴向距离,电磁力先增大后减小。基于天平称重法,设计了可三维调节的电磁力测量装置,提出了轴向距离、径向偏差、相对倾角的归零调节方法;获得了电磁力较为完备的力学特性,通过分段拟合方法,解决了在较小标定力时相对误差较大的问题,确定了电磁力及电流的控制关系及相对位置变化范围;提出了不敏感角、不敏感径向偏差、不敏感轴向距离区间等新概念,为电磁力产生装置的性能表征提供了具体参数。
The generation of high-precision calibration force is one of the keys to high precision micro-thrust measurement. Electromagnetic force with non-contact, simple structure, easy to control and other advantages, a micro-thrust measurement system effective calibration force generation method. According to the performance requirements of micro-thrust measurement for electromagnetic calibration force, the influence of the relative position between magnet and coil on the electromagnetic force is studied. The axial distance, radial deviation and electromagnetic force Output characteristics: relative inclination, the radial deviation is not 0, the electromagnetic force will be larger, and about the center axis of the magnet symmetry, along the axial distance, the electromagnetic force first increases and then decreases. Based on the balance weighing method, a three-dimensionally adjustable electromagnetic force measuring device is designed and a method of zero adjustment of axial distance, radial deviation and relative inclination is proposed. The more complete mechanical properties of the electromagnetic force are obtained, Method to solve the relatively large error in the smaller calibration force, to determine the electromagnetic force and current control relationship and the relative scope of the change range; proposed insensitive angle, insensitive radial deviation, insensitive axial distance range And other new concepts for the performance of electromagnetic force generating device provides a specific parameter.