【摘 要】
：
采用Ｖ２Ｏ５熔体淬水制成胶体，并浸涂于不同的基片上，分别用于电阻检测和组织结构分析。经过真空加热分解Ｖ２Ｏ５凝胶薄膜，得到了具有相变特性的ＶＯ２薄膜。在真空热处理温度为５００℃ ，时间为３４ｈ， 真空气压
【机 构】
：
西安交通大学材料科学与工程学院,西安交通大学材料科学与工程学院,西安交通大学材料科学与工程学院,西安理工大学材料科学与工程学院 陕西 西安 710049 西安理工大学 材料科学与工程学院 陕西
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采用Ｖ２Ｏ５熔体淬水制成胶体，并浸涂于不同的基片上，分别用于电阻检测和组织结构分析。经过真空加热分解Ｖ２Ｏ５凝胶薄膜，得到了具有相变特性的ＶＯ２薄膜。在真空热处理温度为５００℃ ，时间为３４ｈ， 真空气压为２Ｐａ，得到的ＶＯ２相变薄膜电阻突变量级达３．４，相变温度在６７℃左右。另外，ＴＥＭ组织观察表明，ＶＯ２薄膜为多晶组织，ＶＯ２薄膜晶粒尺寸对电阻突变量级影响较大。晶粒尺寸增加，电阻突变量级增大。ＶＯ２晶界对相变有阻碍作用。
Using V2O5 melt quenching made colloids, and dip coated on different substrates, respectively, for resistance testing and organizational structure analysis. V2O5 gel films were decomposed by vacuum heating to obtain VO2 films with phase transition characteristics. In the vacuum heat treatment temperature is 500 ℃, the time is 34h, the vacuum pressure is 2Pa, the obtained VO2 phase change film has a sudden change of resistance of 3.4 and a phase transition temperature of about 67 ℃. In addition, the TEM observation shows that the VO2 film is polycrystalline, and the grain size of VO2 film has a great influence on the order of resistance mutation. The grain size increases, and the magnitude of the resistance mutation increases. VO2 grain boundaries hindered the phase transition.
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