论文部分内容阅读
通过白光扫描干涉术研究了用于非球面元件的大范围测量方法并利用纳米测量机(NMM)构建了测量系统。对系统的运行环境进行分析,定量给出了评定结果。在系统环境得以保证的前提下,重点研究了无重叠拼接方法,并将结果进行了对比;针对周期性非球面光学表面,提出通过白光倾斜扫描干涉法进行测量。扫描过程中,测试样品倾斜通过干涉区,消除了物镜视场的影响,使毫米量级表面一次扫描即可完成测量。针对扫描过程,分析了扫描过程中干涉条纹移出视场现象及双角度不一致对测量结果的影响。
A wide range of measurement methods for aspheric elements were investigated by white-light scanning interferometry and a measurement system was constructed using a nanometer measuring machine (NMM). The operating environment of the system analysis, quantitative assessment results are given. Under the premise of ensuring the system environment, the non-overlapping splicing method is studied emphatically, and the results are compared. For the periodic aspheric optical surface, the measurement by white-light oblique scanning interferometry is proposed. During scanning, the test sample tilts through the interference zone, eliminating the effect of the field of view of the objective and allowing the millimeter-scale surface to be scanned at a single pass. Aiming at the scanning process, the influence of the interference fringes moving out of the field of view and the inconsistencies of the two angles on the measurement results were analyzed.