论文部分内容阅读
为了有效检测光学基底和镀膜后的光学元件质量,根据微面元电磁散射理论建立了一阶极化光散射模型,推导求解出其极化双向反射分布函数,获得了极化双向反射分布函数PP项与散射角和方位角的三维关系。数值模拟分析了入射角、基底粗糙度及不同涂层厚度对极化双向反射分布函数的影响。数值结果表明:极化双向反射分布函数与入射角、相关长度、均方根高度及涂层厚度均成反比。P极化入射产生的P极化双向反射分布函数强烈依赖于入射角、散射角和方位角。布鲁斯特角的位置随着入射角的增加逐渐向散射方位角小的方向移动。
In order to effectively detect the optical substrate and optical quality after coating, a first-order polarized light scattering model was established according to the theory of electromagnetic scattering of micro-plane, and the polarized birefringence distribution function was derived. The polarized birefringence distribution function PP Three-dimensional relationship between terms and scattering angles and azimuths. The effects of incident angle, substrate roughness and thickness of different coatings on the polarization birefringence distribution function were analyzed numerically. Numerical results show that the polarized birefringence distribution function is inversely proportional to the incident angle, correlation length, root mean square height and coating thickness. The P-polarized birefringence distribution function produced by P-polarized incident strongly depends on the angle of incidence, scattering angle and azimuth. Brewster’s position gradually increases with the incident angle in the direction of small scattering azimuth.