An Optical Pressure Sensor Based on MEMS

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An optical fiber pressure sensor has been developed for the measurement in human body.The sensing element is possessed of a membrane structure,which is fabricated by micromachining.The fabrication process includes anisotropic wet etching on the silicon wafer.For the transmitting source and signal light,a multimode optical fiber 50/125 μm (core/clad)in diameter was used.The intensity of the light reflected back into the fiber varies with the membrane deflection,which is s function of pressure.The deflection of the membrane by applied pressure can be mathematically described. An optical fiber pressure sensor has been developed for the measurement in human body. The sensing element is possessed of a membrane structure, which is fabricated by micromachining. The fabrication process includes anisotropic wet etching on the silicon wafer. For the transmitting source and signal light , a multimode optical fiber 50/125 μm (core / clad) in diameter was used. The intensity of the light varies back to the fiber varies with the membrane deflection, which is s function of pressure. The deflection of the membrane by applied pressure can be mathematically described.
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