目前我国拥有能谱仪的单位不少,随着时间的推移。仪器的故障发生率在增加,设备的维修工作,已经成为各用户较为关心的问题。我们在EDAX—9100/60仪器的维修方面做了一些工作,先后排除了“谱线不收集”、“功能键菜单紊乱”、“键盘失灵”等故障。本文先介绍“谱线不收集”的故障排除经验,其它故障排除经验以后陆续发表。我们使用的是日本菲利浦公司的EDAX—9100 60能谱仪,该能谱仪安装在日本日立公司的S～550(配两道波谱仪)扫描电镜上。故障现象为:开机后,能引导程序,功能键显示正常,屏幕显示的专用区域的计分也正常,但按STRT键后,谱线显示区域无谱线出现。这时,计数率RATE有记数,并随信号强弱而 At present, China has a lot of energy spectrometer units, with the passage of time. The incidence of equipment failure increases, the maintenance of equipment, has become a more concerned issues for all users. We did some work on the maintenance of the EDAX-9100/60 instrument, and we ruled out such problems as “spectral line not collected”, “functional menu disorder”, “keyboard failure” and so on. This article first introduced the “spectrum does not collect” troubleshooting experience, other troubleshooting experience after another published. We use the EDAX-9100 60 spectrometer from Philips Japan, which is installed on Hitachi’s S 550 (with two-channel spectrometer) SEM. Symptoms: boot, can guide the program, the function keys show normal, the screen shows the dedicated area of ​​the scoring is normal, but by STRT key, spectral lines show no spectral lines appear. At this time, the count rate RATE has a count, and with the signal strength