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介绍自行研制的多功能、多用途、计算机控制的大型微波等离子体应用与诊断设备，该设备包括一台高稳定１．５ｋＷ／２４５０ＭＨｚ微波源，微波传输与微波耦合系统，ＥＣＲ微波反应腔，大容积等离子体反应腔，真空获得系统，八路气体供给与控制系统，八探头等离子体诊断系统（包括径向和轴向朗缪探针，法拉第筒，能量分析器和等离子体鞘层探测器），多通道瞬态数据采集系统和计算机总控制系统，能较好满足微波等离子体基础研究和应用研究的多种要求和需要。
This paper introduces a large-scale microwave plasma application and diagnosis device developed by ourselves which is composed of a high stability 1.5kW / 2450MHz microwave source, microwave transmission and microwave coupling system, ECR microwave reaction chamber, large Volume plasma reaction chamber, vacuum acquisition system, eight-way gas supply and control system, eight-probe plasma diagnostic system (including radial and axial Auger probes, Faraday cup, energy analyzer and plasma sheath detector) Multi-channel transient data acquisition system and computer control system, microwave plasma can better meet the basic research and application of a variety of requirements and needs.