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简单介绍了钛泵的工作原理。溅射离子泵在高电压和高磁场的作用下产生潘宁放电,吸附容器内气体分子达到真空的目的。由于设备老化或操作不当等原因,溅射离子泵会发生各种故障。本文列举了溅射离子泵的各种常见故障,根据工作机理分析了溅射离子泵发生故障的原因,并介绍了排除故障和维护保养的方法。对于钛泵的操作使用人员和维修人员具有一定的借鉴意义。
A brief introduction to the working principle of titanium pump. Sputtering ion pump in high voltage and high magnetic field under the action of Penning discharge, the adsorption of gas molecules in the container to achieve the purpose of vacuum. Due to equipment aging or improper operation and other reasons, sputtering ion pump will occur a variety of failures. This article lists various common failures of sputter ion pumps, analyzes the causes of the failure of sputter ion pumps according to the working mechanism, and introduces the methods of troubleshooting and maintenance. Titanium pump for the operation of personnel and maintenance staff has some reference.