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分析了几种应用于纳米精度测量的光干涉技术工作原理、应用限制及研究现状,包括X射线干涉仪、干涉仪及激光外差干涉技术。
Several working principles, application limits and research status of optical interferometry used in nanometer precision measurement are analyzed, including X-ray interferometer, interferometer and laser heterodyne interferometry.