和传统的共面波导谐振腔相比,超导共面波导谐振器(SCPWR)具有低损耗、高Q值等优势,可以方便地与超导量子比特相互耦合.通过在谐振器的中心导体中嵌入一系列的dc-SQUID,可以实现谐振器谐振频率的连续可调.我们利用深紫外曝光和电子束蒸发相结合的微加工工艺,制备了分别嵌入1个和3个dc-SQUID的SCPWR,并在极低温(mK)和低噪声环境下,测量了样品的传输特性.实验结果表明,嵌入1个和3个dc-SQUID的实验样品分别实现了60 MHz和187 MHz范围的谐振频率可调,实验数据与理论计算结果具有较好的一致性. Compared with the traditional coplanar waveguide cavity, the superconducting Coplanar Waveguide Resonator (SCPWR) has the advantages of low loss, high Q value and so on, and can be easily coupled with the superconducting qubit through the central conductor in the resonator A series of dc-SQUIDs can be embedded into a series of dc-SQUIDs to achieve a continuous tunable resonant frequency.The SCPWRs with one dc-SQUID and three dc-SQUIDs embedded respectively by micro-fabrication with deep UV exposure and electron beam evaporation, And the transmission characteristics of the samples were measured at very low temperature (mK) and low noise.The experimental results show that the experimental samples embedded with 1 and 3 dc-SQUIDs respectively have tunable resonant frequencies in the range of 60 MHz and 187 MHz , Experimental data and theoretical calculations have good consistency.