The growth of MnsGe3 ultrathin films with different thicknesses,prepared by solid phase epitaxy,is studied.The results of scanning tunnelling microscopy and low energy electron diffraction studies show that the film can be formed and it is terminated with a(√3×√3)R30° surface reconstruction when the thickness of Mn exceeds 3 monolayers.The magnetic properties show that the Curie temperature is about 300 K and the T2-dependent behaviour is observed to remain up to 220K.