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成功地利用超声喷雾热解法在玻璃衬底上制备了TiO2薄膜。Ti(SO4)2作为钛源,甲醇作为溶剂。利用超声波的雾化作用将反应物形成细小的雾滴,并喷射到预热的玻璃衬底上分解而形成稳定的TiO2薄膜。为获得致密均匀的薄膜,优化了反应物浓度、温度、沉积时间等参数。利用X射线衍射与原子力显微镜表征了薄膜的晶体结构与表面形貌。X射线结果表明薄膜为多晶锐钛矿结构TiO2薄膜,并在(101)方向呈现出择优趋势。
TiO2 thin films were successfully prepared on glass substrates by ultrasonic spray pyrolysis. Ti (SO4) 2 as a titanium source and methanol as a solvent. The use of ultrasonic atomization of the reactants to form small droplets, and spray the preheated glass substrate decomposition to form a stable TiO2 film. In order to obtain a dense and uniform film, parameters such as reactant concentration, temperature, deposition time and the like are optimized. The crystal structure and surface morphology of the films were characterized by X-ray diffraction and atomic force microscopy. The results of X-ray show that the film is a polycrystalline anatase TiO 2 film and shows a preferential tendency in the (101) direction.