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本文介绍了 Si_(1-x)Ge_x 基区异质结双极晶体管(HBT)的特点;Si_(1-x)Ge_x 合金层的生长方法;两种 Si_(1-x)Ge_x 基区 npn 器件的结构和特性以及对 Si_(1-x)Ge_x 合金层质量估价和异质结特性的检测方法。
In this paper, the characteristics of Si_ (1-x) Ge_x base-region heterojunction bipolar transistor (HBT), the growth method of Si_ (1-x) Ge_x alloy layer, Structure and properties of Si_ (1-x) Ge_x alloy and the detection of heterojunction characteristics.