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针对MEMS陀螺中带孔结构的空气阻尼问题,根据制作的微陀螺,利用MATLAB软件对模态匹配、Q值匹配与灵敏度之间的关系进行了仿真分析。仿真结果表明在驱动和检测模态匹配时灵敏度幅值最大,但工作带宽却随Qx与Qz乘积的增大而减小。建立了空气阻尼计算模型,并利用实验测试数据对空气阻尼计算模型进行了分析和检验。研究发现,微陀螺在驱动方向上,带孔平板结构的滑膜空气阻尼计算模型存在一定误差,经过系数修正后Q值的理论值与测试值具有较好的一致性,但仍需要进一步地修正和完善;在检测方向上,压膜空气阻尼模型比较准确,精度较高能控制在5%以内,可直接用于微陀螺的空气阻尼设计中。
Aiming at the air damping problem of the hole structure with MEMS gyroscope, the relationship between modal matching, Q matching and sensitivity is simulated and analyzed by using the MATLAB software. The simulation results show that the amplitude of sensitivity is maximized when driving and detecting modes are matched, but the working bandwidth decreases with the increase of Qx and Qz. The air damping calculation model is established, and the air damping calculation model is analyzed and tested by using the experimental test data. It is found that there is a certain error in the driving direction of the gyroscope, and there is a good agreement between the theoretical value of the Q value and the measured value after the coefficient correction. However, it still needs to be further corrected And perfect; in the test direction, the film damping model of air more accurate, high precision can be controlled within 5%, can be used directly in the air-suspension micro-gyro design.