为了得到相变温度低且性能优越的智能窗光学材料,基于时域有限差分法模拟计算了不同结构的VO_2纳米周期点阵相变前后的光学特性,优选出最佳的VO_2纳米周期点阵结构.采用直流磁控溅射和后退火工艺在玻璃衬底上制备VO_2薄膜,再利用掩膜光刻的方法制备VO_2纳米周期点阵结构,测试其组分结构,反射和透过率曲线.结果表明,填充比为0.74的圆形纳米周期点阵的相变温度有效降低了约25℃,在波长为1700 nm处的透过率改变量达到39%,透过率整体高于VO_2薄膜,呈现出良好的相变光学特性,说明通过调控VO_2纳米周期点阵的结构可以有效提升材料的光学特性. In order to obtain the smart window optical material with low phase transition temperature and high performance, the optical properties before and after phase transition of VO2 nanostructures with different structures were simulated and calculated based on the finite difference time domain method, and the best VO_2 nanocrystalline lattice structure VO_2 thin films were prepared on glass substrates by DC magnetron sputtering and post annealing, and then the VO_2 nano-periodic lattice structures were prepared by mask lithography and their compositional structure, reflection and transmittance curves were tested. Results The results show that the phase transformation temperature of circular nanocrystalline lattice with a filling ratio of 0.74 is effectively reduced by about 25 ℃ and the transmittance change reaches 39% at a wavelength of 1700 nm. The overall transmittance is higher than that of the VO_2 thin film A good phase transition optical properties, indicating that by adjusting the structure of VO2 nano-periodic lattice can effectively enhance the optical properties of materials.