论文部分内容阅读
提出了一种改进后的缓冲氢氟酸溶液,成分配比为4份40%氟化铵溶液、1份40%氢氟酸和2份甘油.通过在牺牲层腐蚀过程中对腐蚀液加热和搅拌提高了其对氧化硅和铝的选择比,测定了氧化硅和铝的腐蚀速率随腐蚀液温度变化的关系,确定了这种腐蚀液的最优工作条件,研究了加入甘油对腐蚀液腐蚀效果的影响,并在实际器件加工过程中测试了这种方法.
An improved buffered hydrofluoric acid solution is proposed with 4 parts of 40% ammonium fluoride solution, 1 part of 40% hydrofluoric acid and 2 parts of glycerol. By heating the etching solution during the sacrificial layer etching process, Stirring to improve its selectivity to silicon oxide and aluminum, the determination of silicon oxide and aluminum corrosion rate with the temperature changes in the relationship between the fluid to determine the optimal working conditions of the etching solution was studied by adding glycerin etching solution corrosion Effect of the effect, and tested in the actual device processing this method.