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为了消除磁控溅射涂层的柱状晶结构,提高Ti-B基涂层的耐蚀防护性能。采用磁控溅射技术,通过成分调控和工艺调控,获得了不同Ti含量的非晶Ti-B涂层。利用X射线衍射、扫描电镜、纳米压痕仪、电化学工作站对涂层的结构和性能进行了分析。结果表明:所获得的不同Ti含量的涂层分别是44.5%,51.6%,55.3%(原子比);三种涂层均为非晶生长结构,XRD图线形状和变化趋势均相似;截面形貌差异不大,都为均匀致密的平滑结构。随着Ti含量的增加,Ti-B涂层的硬度逐渐减小,最小硬度为25.9 GPa,仍属于硬质涂层;涂层的塑性指数逐渐增大,最大为0.56。三种Ti含量的涂层对于基材SS304都具有耐蚀保护作用;随着Ti含量的增加,涂层的耐蚀性能逐渐提高,最小腐蚀电流密度为1.49×10-7A/cm2,比基材降低了大约1个数量级。通过研究,获得了综合性能较高的非晶二元系耐蚀硬质TiB基涂层。
In order to eliminate the columnar crystal structure of the magnetron sputtering coating, improve the corrosion protection performance of the Ti-B based coating. Using magnetron sputtering technology, through the composition control and process control, get different Ti content of amorphous Ti-B coating. The structure and properties of the coatings were analyzed by X-ray diffraction, scanning electron microscopy, nanoindentation and electrochemical workstation. The results show that the coatings with different Ti contents are 44.5%, 51.6% and 55.3% (atomic ratio), respectively. All three coatings are amorphous and have similar XRD pattern and cross section. Appearance difference is not, are uniform and compact smooth structure. With the increase of Ti content, the hardness of Ti-B coating gradually decreases and the minimum hardness is 25.9 GPa, which still belongs to the hard coating. The plasticity index of the coating gradually increases up to 0.56. The coatings with three kinds of Ti content have anti-corrosion protection on the substrate SS304. With the increase of Ti content, the corrosion resistance of the coating gradually increases, the minimum corrosion current density is 1.49 × 10-7A / cm2, Reduced by about 1 order of magnitude. Through the research, the amorphous binary system corrosion-resistant hard TiB-based coating with high comprehensive properties was obtained.